Fabrication of Nanoelectrodes by Cutting Carbon Nanotubes Assembled by Di-Electrophoresis Based on Atomic Force Microscope

Fabrication of Nanoelectrodes by Cutting Carbon Nanotubes Assembled by Di-Electrophoresis Based on Atomic Force Microscope

Zengxu Zhao (Shenyang Institute of Automation, Chinese Academy of Sciences, China), Xiaojun Tian (Shenyang Institute of Automation, Chinese Academy of Sciences, China), Zaili Dong (Shenyang Institute of Automation, Chinese Academy of Sciences, China) and Ke Xu (Shenyang Jianzhu University, China)
Copyright: © 2014 |Pages: 10
DOI: 10.4018/978-1-4666-5125-8.ch065

Abstract

Presented is a new fabrication method for CNT (Carbon NanoTubes) nanoelectrode pairs by combining the DEP (Di-electrophoresis) and AFM (Atomic Force Microscope) lithography. The single CNT is driven and electrically connected with the microeletrodes by the DEP force,then cut into nanoeletrode pairs with AFM tip. The fabricated CNT nanoeletrode pairs can be used as probes to detect species in micro-environment and applied in electrochemical sensors.
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Experimental Materials And System

A. Materials

MWCNTs, whose average diameter is 5-25nm, and length is 1-4μm, were synthesized by CVD. The 10μm wide electrodes with a 3μm wide gap were made by lithography.

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