What is EOT (Equivalent Oxide Thickness)

In Complementary Metal-Oxide-Semiconductor (CMOS) technology, scaling has been a main key for continuous progress in silicon-based semiconductor industry over the past four decades. However, as the technology advancement on nanometer scale regime for the purpose of building ultra-high density integrated electronic computers and extending performance, CMOS devices are facing fundamental problems such as increased leakage currents, large process parameter variations, short channel effects, increase in manufacturing cost, etc. The new technology must be energy efficient, dense, and enable more device function per unit area and time. There are many novel nanoscale semiconductor devices, this book chapter introduces and summarizes progress in the development of the Tunnel Field-Effect Transistors (TFETs) for low power design. Tunnel FETs are interesting devices for ultra-low power applications due to their steep sub-threshold swing (SS) and very low OFF-current. Tunnel FETs avoid the limit 60mv/decade by using quantum-mechanical Band-to-Band Tunneling (BTBT).