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Carbon Nano Tube-Based Sensor Design for NEMS/MEMS Applications

Carbon Nano Tube-Based Sensor Design for NEMS/MEMS Applications

Rekha Devi, Sandeep Singh Gill
Copyright: © 2020 |Pages: 17
ISBN13: 9781799813934|ISBN10: 1799813932|ISBN13 Softcover: 9781799813941|EISBN13: 9781799813958
DOI: 10.4018/978-1-7998-1393-4.ch003
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MLA

Devi, Rekha, and Sandeep Singh Gill. "Carbon Nano Tube-Based Sensor Design for NEMS/MEMS Applications." Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET), edited by Balwinder Raj, et al., IGI Global, 2020, pp. 37-53. https://doi.org/10.4018/978-1-7998-1393-4.ch003

APA

Devi, R. & Gill, S. S. (2020). Carbon Nano Tube-Based Sensor Design for NEMS/MEMS Applications. In B. Raj, M. Khosla, & A. Singh (Eds.), Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET) (pp. 37-53). IGI Global. https://doi.org/10.4018/978-1-7998-1393-4.ch003

Chicago

Devi, Rekha, and Sandeep Singh Gill. "Carbon Nano Tube-Based Sensor Design for NEMS/MEMS Applications." In Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET), edited by Balwinder Raj, Mamta Khosla, and Amandeep Singh, 37-53. Hershey, PA: IGI Global, 2020. https://doi.org/10.4018/978-1-7998-1393-4.ch003

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Abstract

This chapter deals with designing CNT-based piezoresistive pressure sensors with different boss sizes and with different configurations designed for low pressure range. The purpose for this work is to show a NEMS-based pressure sensor, which was analyzed by using ANSYS 17 software. The different combination of the diaphragm shows the improved performance of the pressure sensor in the case of CNT as compare to the silicon. This chapter is organized in sections, where section 2 discusses the review of CNT based MEMS/NEM design process and applications, Section 3 elaborates the use of CNT materials for design piezoresistive pressure sensors, Section 4 discusses mathematical modeling and simulation of CNT-based piezoresistive pressure sensors, Section 5 examines the results and discussion in terms of linearity and sensitivity of designed sensor, and Section 6 consummates the chapter with the conclusion.

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