MLA
Wu, NaiQi, and MengChu Zhou. "A Resource-Oriented Petri Net Approach to Scheduling and Control of Time-Constrained Cluster Tools in Semiconductor Fabrication." Formal Methods in Manufacturing Systems: Recent Advances, edited by Zhiwu Li and Abdulrahman M. Al-Ahmari, IGI Global, 2013, pp. 136-177. https://doi.org/10.4018/978-1-4666-4034-4.ch007
APA
Wu, N. & Zhou, M. (2013). A Resource-Oriented Petri Net Approach to Scheduling and Control of Time-Constrained Cluster Tools in Semiconductor Fabrication. In Z. Li & A. Al-Ahmari (Eds.), Formal Methods in Manufacturing Systems: Recent Advances (pp. 136-177). IGI Global. https://doi.org/10.4018/978-1-4666-4034-4.ch007
Chicago
Wu, NaiQi, and MengChu Zhou. "A Resource-Oriented Petri Net Approach to Scheduling and Control of Time-Constrained Cluster Tools in Semiconductor Fabrication." In Formal Methods in Manufacturing Systems: Recent Advances, edited by Zhiwu Li and Abdulrahman M. Al-Ahmari, 136-177. Hershey, PA: IGI Global, 2013. https://doi.org/10.4018/978-1-4666-4034-4.ch007
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