A Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

Principle Research

The stick-slip driving is a typical drive mode based on the theory of the friction (Brufau et al., 2005). The essence of stick-slip driving is executed by the difference between friction force and impulsive force. The driving method can be divided into stepping-mode and scanning-mode (Arvid, 2003). In the stepping-mode, each step consists of a slow deformation of the PZT followed by an abrupt jump backward (Meyer, Sqalli, Lorenz, & Karrai, 2005). During the slow deformation the stage follows the PZT because of friction (stick), whereas it cannot follow the sudden jump because of its inertia (slip). The step frequency and the amplitude are decided by the frequency and the amplitude of voltage driving signal. The stepping-mode allows long displacements at a relatively high speed (typically 2mm/s). The resolution is limited by the displacement of a step. In the scanning-mode, the position of the stage is within less than a step distance from the target, the PZT are deformed slowly until the final position is reached. The resolution is a fraction of a step (typically better than 5nm).