A Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

A Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

Bowen Zhong (Harbin Institute of Technology, China), Liguo Chen (Soochow University, China), Zhenhua Wang (Soochow University, China) and Lining Sun (Harbin Institute of Technology, China)
Copyright: © 2012 |Pages: 14
DOI: 10.4018/ijimr.2012040101
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Abstract

This article focuses on developing a novel trans-scale precision positioning stage based on the stick-slip effect. The stick-slip effect is introduced and the rigid kinematics model of the stick-slip driving is established. The forward and return displacement equations of each step of the stick-slip driving are deduced. The relationship of return displacement and the acceleration produced by friction are obtained according to displacement equations. Combining with LuGre friction model, the flexible dynamics model of the stick-slip driving is established and simulated by using Simulink software. Simulation results show that the backward displacement will reduce with the acceleration of the slider produced by dynamic friction force, the rigid kinematics model is also verified by simulation results which are explained in further detail in the article.
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Principle Research

The stick-slip driving is a typical drive mode based on the theory of the friction (Brufau et al., 2005). The essence of stick-slip driving is executed by the difference between friction force and impulsive force. The driving method can be divided into stepping-mode and scanning-mode (Arvid, 2003). In the stepping-mode, each step consists of a slow deformation of the PZT followed by an abrupt jump backward (Meyer, Sqalli, Lorenz, & Karrai, 2005). During the slow deformation the stage follows the PZT because of friction (stick), whereas it cannot follow the sudden jump because of its inertia (slip). The step frequency and the amplitude are decided by the frequency and the amplitude of voltage driving signal. The stepping-mode allows long displacements at a relatively high speed (typically 2mm/s). The resolution is limited by the displacement of a step. In the scanning-mode, the position of the stage is within less than a step distance from the target, the PZT are deformed slowly until the final position is reached. The resolution is a fraction of a step (typically better than 5nm).

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