Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution (pages 38-52)
Zhuang Xiong (CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d’Ascq, Lille, France), Benjamin Walter (CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d’Ascq, Lille, France), Estelle Mairiaux (CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d’Ascq, Lille, France), Marc Faucher (CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d’Ascq, Lille, France), Lionel Buchaillot (CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d’Ascq, Lille, France), Bernard Legrand (CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d’Ascq, Lille, France)